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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Review: Electrostatically actuated nanobeam-based nanoelectromechanical switches - materials solutions and

Liga Jasulaneca1, Jelena Kosmaca1, Raimonds Meija1

  • 1Institute of Chemical Physics.

Beilstein Journal of Nanotechnology
|February 15, 2018
PubMed

Keywords:
NEMnanocontactsnanoelectromechanical switchesnanowiresreliability

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