High-speed broadband elastic actuator in water using induced-charge electro-osmosis with a skew structure

An artificial cilium using ac electro-osmosis (ACEO) is attractive because of its large potentiality for innovative microfluidic applications. However, the ACEO cilium has not been probed experimentally and has a shortcoming that the working frequency range is very narrow. Thus, we here propose an ACEO elastic actuator having a skew structure that broadens a working frequency range and experimentally demonstrate that the elastic actuator in water can be driven with a high-speed (∼10 Hz) and a wide frequency range (∼0.1 to ∼10 kHz). Moreover, we propose a simple self-consistent model that explains the broadband characteristic due to the skew structure with other characteristics. By comparing the theoretical results with the experimental results, we find that they agree fairly well. We believe that our ACEO elastic actuator will play an important role in microfluidics in the future.