Assessment of titanium metallization thin film deposited on alumina substrate: Microstructure and nano-indentation

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Reactive Vapor Deposition of Conjugated Polymer Films on Arbitrary Substrates
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Xuegang Xing1, Hefeng Wang2, Gesheng Xiao1

  • 1Institute of Applied Mechanics and Biomedical Engineering, Taiyuan University of Technology, Taiyuan 030024, China.

Journal of the Mechanical Behavior of Biomedical Materials
|February 18, 2018
PubMed

Keywords:
AluminaInterfaceMicrostructureNano-indentationTemperatureTi metallizationtitanium thin filmalumina coatingchemical vapor depositionnano-indentationthin film mechanical properties

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