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Related Experiment Video

Updated: Feb 14, 2026

Process of Making Three-dimensional Microstructures using Vaporization of a Sacrificial Component

Process of Making Three-dimensional Microstructures using Vaporization of a Sacrificial Component

Published on: November 2, 2013

Three-Dimensional Multiscale, Multistable, and Geometrically Diverse Microstructures with Tunable Vibrational

Xin Ning¹, Heling Wang², Xinge Yu¹

¹Department of Materials Science and Engineering, Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801 (USA).

Advanced Functional Materials

|February 20, 2018

Summary

Researchers developed novel three-dimensional (3D) micromechanical systems using controlled buckling. These 3D microelectromechanical systems offer tunable frequencies and broad bandwidths for diverse applications.

Keywords:

3D microstructures Compressive Buckling Microelectromechanical systems vibrational modes

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Last Updated: Feb 14, 2026

Process of Making Three-dimensional Microstructures using Vaporization of a Sacrificial Component

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Published on: November 2, 2013

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Manufacturing of Three-dimensionally Microstructured Nanocomposites through Microfluidic Infiltration

Manufacturing of Three-dimensionally Microstructured Nanocomposites through Microfluidic Infiltration

Published on: March 12, 2014

Area of Science:

Materials Science
Mechanical Engineering
Nanotechnology

Background:

Conventional microelectromechanical systems (MEMS) are often limited to 2D designs and simple geometries.
Achieving tunable resonant frequencies and broad operational bandwidths in MEMS typically requires complex designs and fabrication.
Existing MEMS face limitations in achieving versatile mechanical behaviors and frequency control.

Purpose of the Study:

To introduce novel three-dimensional (3D) micromechanical systems.
To demonstrate fabrication of 3D structures using controlled compressive buckling.
To explore enhanced frequency tunability and operational bandwidths in MEMS.

Main Methods:

Fabrication of 3D micromechanical systems via controlled compressive buckling.
Utilizing diverse materials including polymers, silicon, and composites.
Employing systematic experimental and computational studies on various 3D geometries.
Investigating frequency control through elastomeric substrate deformation.

Main Results:

Successful fabrication of diverse 3D micromechanical systems (e.g., tables, cages, flowers, helices).
Demonstrated tunable resonant frequencies and broad operational bandwidths.
Exhibited multistable mechanical responses and vibrationally de-coupled elements.
Showcased frequency control via substrate deformation.

Conclusions:

Controlled compressive buckling enables versatile 3D micromechanical systems.
These 3D structures offer significant advantages in frequency tunability and bandwidth.
The developed platforms provide a foundation for advanced MEMS in areas like biosensing and energy harvesting.