Uncertainly Analysis of Two Types of Humidity Sensors by a Humidity Generator with a Divided-Flow System

Humidity measurement is an important technique for the agricultural, foods, pharmaceuticals, and chemical industries. For the sake of convenience, electrical relative humidity (RH) sensors have been widely used. These sensors need to be calibrated to ensure their accuracy and the uncertainty measurement of these sensors has become a major concern. In this study, a self-made divided-flow generator was established to calibrate two types of electrical humidity sensors. The standard reference humidity was calculated from dew-point temperature and air dry-bulb temperature measured by a chilled mirror monitor. This divided-flow generator could produce consistent result of RH measurement results. The uncertainty of the reference standard increased with the increase of RH values. The combined uncertainty with the adequate calibration equations were ranged from 0.82% to 1.45% RH for resistive humidity sensors and 0.63% to 1.4% for capacitive humidity sensors, respectively. This self-made, divided-flow generator, and calibration method are cheap, time-saving, and easy to be used. Thus, the proposed approach can easily be applied in research laboratories.