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Updated: Feb 13, 2026

Processing of Bulk Nanocrystalline Metals at the US Army Research Laboratory
Published on: March 7, 2018
Nanocrystalline SiC film thermistors for cryogenic applications
V F Mitin1, V V Kholevchuk1, A V Semenov2
1V. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine, Kyiv 03028, Ukraine.
Abstract:
We developed a heat-sensitive material based on nanocrystalline SiC films obtained by direct deposition of carbon and silicon ions onto sapphire substrates. These SiC films can be used for resistance thermometers operating in the 2 K-300 K temperature range. Having high heat sensitivity, they are relatively low sensitive to the magnetic field. The designs of the sensors are presented together with a discussion of their thermometric characteristics and sensitivity to magnetic fields.
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