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Design of angle-resolved illumination optics using nonimaging bi-telecentricity for 193 nm scatterfield microscopy

Martin Y Sohn1, Bryan M Barnes1, Richard M Silver1

  • 1Engineering Physics Division, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899, USA.

Optik
|March 6, 2018
PubMed

Keywords:
193 nm microscopyAngle-resolved illuminationBi-telecentric systemLens system designOptical microscopyScatterfield microscopy

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