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Dopant Distribution in Atomic Layer Deposited ZnO:Al Films Visualized by Transmission Electron Microscopy and Atom

Yizhi Wu1, A Devin Giddings2, Marcel A Verheijen1

  • 1Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands.

Chemistry of Materials : a Publication of the American Chemical Society
|March 9, 2018
PubMed

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