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Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition
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Combined pulsed laser deposition and non-contact atomic force microscopy system for studies of insulator metal oxide

Daiki Katsube1, Hayato Yamashita1,2, Satoshi Abo1

  • 1Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama, Toyonaka, Osaka 560-8531, Japan.

Beilstein Journal of Nanotechnology
|March 13, 2018
PubMed

Keywords:
atomic resolutionfrequency modulation atomic force microscopyinsulator thin filmpulsed laser deposition

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