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Deterministic Integration of Quantum Dots into on-Chip Multimode Interference Beamsplitters Using in Situ Electron

Peter Schnauber1, Johannes Schall1, Samir Bounouar1

  • 1Institut für Festkörperphysik , Technische Universität Berlin , Hardenbergstraße 36 , 10623 Berlin , Germany.

Nano Letters
|March 21, 2018
PubMed

Keywords:
In situ electron beam lithographydeterministic device manufacturingmultimode interference beamsplitteron-chip quantum opticsquantum dot

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