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High-Sensitivity and Low-Power Flexible Schottky Hydrogen Sensor Based on Silicon Nanomembrane

Minkyu Cho1, Jeonghoon Yun1, Donguk Kwon1

  • 1Department of Mechanical Engineering and KI for NanoCentury , KAIST , Daejeon 34141 , Republic of Korea.

ACS Applied Materials & Interfaces
|March 27, 2018
PubMed

Keywords:
Schottky diodeflexible gas sensorhydrogen sensorlow-power gas sensorpalladiumsilicon nanomembrane

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