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Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
Published on: July 17, 2015
Karl A Hujsak1, Benjamin D Myers1,2, Jann Grovogui1
1Department of Materials Science and Engineering, Northwestern University, Evanston, IL, 60208, United States.
A new method, Orientation Mapping by Electron Channeling (OMEC), offers a low-cost alternative to Electron Backscattered Diffraction for material property analysis. This technique provides high spatial and angular resolution for microstructural characterization.
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