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PSPICE Hybrid Modeling and Simulation of Capacitive Micro-Gyroscopes

Yan Su1,2, Xin Tong3,4, Nan Liu5,6

  • 1State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China. suyan16@semi.ac.cn.

Sensors (Basel, Switzerland)
|March 31, 2018
PubMed

Keywords:
MEMS gyroscopesPSPICEclosed-loophybrid modeloptimizationprototype developmentsimulationtemperature compensation

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