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    This study optimizes filter design for fringe analysis in wavelength scanning interferometry (WSI). Improved filter parameters enhance height measurement accuracy, especially with low signal-to-noise ratio (SNR) signals.

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    Area of Science:

    • Optical Metrology
    • Signal Processing
    • Interferometry

    Background:

    • Fringe analysis algorithms in interferometry, like phase slope and phase algorithms, typically use frequency domain filtering after Fourier transform to extract phase information.
    • Existing literature extensively covers these algorithms but lacks detailed discussion on filter design, a critical component for performance.

    Purpose of the Study:

    • To focus on and optimize the filter design within fringe analysis algorithms for wavelength scanning interferometry (WSI).
    • To enhance the accuracy and robustness of height measurements obtained through interferometric techniques.

    Main Methods:

    • Analysis of spectral characteristics of interference signals to determine the narrow-band nature and central frequency.
    • Theoretical calculation of the central frequency to position the filter pass-band.
    • Simulation-based optimization of the filter window width to balance noise reduction and filter ringing.
    • Experimental validation of the optimized filter design approach.

    Main Results:

    • The effective interference signal in WSI is characterized as narrow-band, allowing for precise filter pass-band determination.
    • Optimized filter window width effectively minimizes noise while mitigating filter ringing, confirmed by simulations.
    • Experimental results show significant improvement in height measurement accuracy, particularly for low signal-to-noise ratio (SNR) conditions.
    • The proposed method demonstrates potential for enhanced immunity to environmental noise through adaptive filter design.

    Conclusions:

    • Optimized filter design is crucial for improving the accuracy of fringe analysis algorithms in WSI.
    • The developed method offers enhanced performance, especially in noisy environments or with low-quality signals.
    • Adaptive filter design based on SNR estimation presents a promising avenue for robust interferometric measurements.