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Updated: Feb 12, 2026

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Full path compensation laser feedback interferometry for remote sensing with recovered nanometer resolutions.

Ling Xu1, Yidong Tan1, Shulian Zhang1

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|April 2, 2018
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Summary
This summary is machine-generated.

This study introduces a new laser feedback method for precise nanometer-scale displacement and vibration measurements, overcoming environmental limits. The double-beam technique offers superior accuracy for remote targets without needing a reference mirror.

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Area of Science:

  • Optics and Photonics
  • Metrology
  • Laser Technology

Background:

  • Existing laser feedback interferometry struggles with environmental disturbances, limiting remote target measurement accuracy to microns.
  • Dead path errors and environmental factors like air disturbances and thermal effects hinder precise measurements.

Purpose of the Study:

  • To present a novel double-beam frequency-shift laser feedback approach for nanometer-scale remote measurements.
  • To eliminate dead path errors and compensate for environmental disturbances in laser interferometry.
  • To achieve high accuracy and stability in displacement and vibration measurements at far distances.

Main Methods:

  • Utilizing a double-beam frequency-shift feedback system with a single Nd:YVO4 crystal.
  • Directing two laser beams onto the measurement target and an adjacent stationary reference surface.
  • Implementing identical feedback paths and frequency shifts for both beams to enable full compensation.

Main Results:

  • Demonstrated nanometer-scale accuracy for displacement and vibration measurements at a 10 m distance.
  • Achieved system stability of ±12 nm over 100 s and ±50 nm over 1000 s under room conditions.
  • Reported a short-term resolution better than 3 nm and excellent linearity (5 × 10^-6 over 300 mm, 1 × 10^-4 over 100 μm).

Conclusions:

  • The proposed double-beam laser feedback method significantly enhances measurement accuracy and stability for remote targets.
  • This technique effectively compensates for environmental disturbances and eliminates dead path errors, enabling nanometer-level precision.
  • The system's performance validates its potential for advanced metrology applications requiring high-resolution remote sensing.