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Plasma-Assisted Molecular Beam Epitaxy Growth of Mg3N2 and Zn3N2 Thin Films
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Development of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies

Tassie K Andersen1, Seyoung Cook1, Erika Benda2

  • 1Materials Science Division, Argonne National Laboratory, 9700 S. Cass Ave., Argonne, Illinois 60439, USA.

The Review of Scientific Instruments
|April 2, 2018
PubMed

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