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Coherence scanning and phase imaging optical interference microscopy at the lateral resolution limit.

Peter Lehmann, Weichang Xie, Benedikt Allendorf

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    |April 4, 2018
    PubMed
    Summary

    High numerical aperture interference microscopy reveals discrepancies in 3D height measurements. Phase analysis shows reduced height, while coherence scanning can overestimate, with wavelength-dependent profile inversions observed.

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    Area of Science:

    • Optical Metrology
    • Interference Microscopy
    • Nanoscale Profilometry

    Background:

    • Interference microscopy is crucial for 3D surface characterization.
    • High numerical apertures (NA) enhance resolution but complicate analysis.
    • Understanding 3D transfer characteristics is vital for accurate metrology.

    Purpose of the Study:

    • To investigate the 3D transfer characteristics of interference microscopy at high NA.
    • To analyze the impact of numerical aperture on height measurements from phase and coherence scanning.
    • To elucidate the wavelength-dependent behavior of interference microscopy.

    Main Methods:

    • Studied reflecting rectangular grating structures.
    • Employed interference microscopy with varying numerical apertures.
    • Utilized phase shifting analysis and coherence scanning techniques.
    • Performed simulations using Kirchhoff diffraction theory and an extended Richards-Wolf model.

    Main Results:

    • Height measurements from phase information were generally reduced.
    • Height values from coherence scanning were sometimes overestimated.
    • A 180° phase shift was observed between phase analysis and coherence peak analysis at longer wavelengths.
    • Increasing evaluation wavelength improved lateral resolution due to high-angle wave contributions.

    Conclusions:

    • Significant differences exist between phase analysis and coherence scanning at high NA.
    • Wavelength-dependent profile inversions are observed, particularly with coherence peak analysis.
    • The findings offer new physical insights into interference microscopy at high numerical apertures.