A Monolithic Electrochemical Micro Seismic Sensor Capable of Monitoring Three-Dimensional Vibrations

Lianhong Chen1,2, Zhenyuan Sun3,4, Guanglei Li5,6

  • 1State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, 100190 Beijing, China. chenlianhong15@mails.ucas.ac.cn.

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