Visualizing a core-shell structure of heavily doped silicon quantum dots by electron microscopy using an atomically

Hiroshi Sugimoto1, Masataka Yamamura, Makoto Sakiyama

  • 1Department of Electrical and Electronic Engineering, Graduate School of Engineering, Kobe University, Rokkodai, Nada, Kobe 657-8501, Japan. sugimoto@eedept.kobe-u.ac.jp.

Nanoscale
|April 12, 2018
PubMed
Summary

We visualized the core-shell structure of boron and phosphorus codoped silicon quantum dots (Si QDs). The study revealed a crystalline Si core and an amorphous shell containing Si, B, and P.

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