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Updated: Feb 11, 2026

Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS
Published on: June 17, 2017
Microelectromechanical system gravimeters as a new tool for gravity imaging
Richard P Middlemiss1, Steven G Bramsiepe2, Rebecca Douglas2
1SUPA School of Physics and Astronomy, University of Glasgow, Kelvin Building, University Avenue, Glasgow G12 8SU, UK richard.middlemiss@glasgow.ac.uk.
Abstract:
A microelectromechanical system (MEMS) gravimeter has been manufactured with a sensitivity of 40 ppb in an integration time of 1 s. This sensor has been used to measure the Earth tides: the elastic deformation of the globe due to tidal forces. No such measurement has been demonstrated before now with a MEMS gravimeter. Since this measurement, the gravimeter has been miniaturized and tested in the field. Measurements of the free-air and Bouguer effects have been demonstrated by monitoring the change in gravitational acceleration measured while going up and down a lift shaft of 20.7 m, and up and down a local hill of 275 m. These tests demonstrate that the device has the potential to be a useful field-portable instrument. The development of an even smaller device is underway, with a total package size similar to that of a smartphone.This article is part of a discussion meeting issue 'The promises of gravitational-wave astronomy'.
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