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    Area of Science:

    • Metrology
    • Optical Engineering
    • Signal Processing

    Background:

    • Heterodyne interferometers are crucial for precision measurements.
    • Accurate integer fringe counting is essential for reliable displacement measurement.
    • Signal jitter can compromise the accuracy of fringe counting in interferometric systems.

    Purpose of the Study:

    • To propose a novel signal processing method for heterodyne interferometers.
    • To enhance the accuracy and reliability of integer fringe counting.
    • To ensure correct combination of integer and fractional fringe counting despite signal instability.

    Main Methods:

    • A novel signal processing method based on phase shift of the reference signal.
    • Integer fringe counting using overflow judgment and compensation.
    • Utilizing a 180° phase-shifted reference signal for integer compensation.
    • Development of a Field-Programmable Gate Array (FPGA) based signal processing board.

    Main Results:

    • The proposed method achieves long-time and correct integer number measurement.
    • Compensation for unstable integer numbers effectively eliminates the influence of jitter.
    • Static and dynamic resolution of the method were analyzed.
    • Feasibility verified through three tests and effectiveness demonstrated in displacement measurement experiments.

    Conclusions:

    • The novel phase shift signal processing method ensures accurate integer and fractional fringe counting.
    • The method is effective for precision displacement measurement and stage testing using interferometers.
    • FPGA implementation provides a practical solution for real-time signal processing in interferometry.