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Development of an Innovative LED-based Illumination Device for In Vitro Application of Photodynamic Therapy with Rose Bengal

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High-power modular LED-based illumination systems for mask-aligner lithography.

Johana Bernasconi, Toralf Scharf, Uwe Vogler

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High power light emitting diodes (LEDs) offer a promising alternative to traditional mercury arc lamps for mask aligner lithography. This study demonstrates an LED-based prototype with excellent performance, achieving 1-micron resolution in contact printing.

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Area of Science:

Optics and Photonics
Semiconductor Manufacturing

Background:

Traditional mask aligner lithography relies on mercury arc lamps (250-600 nm).
Mercury arc lamps have several disadvantages, necessitating alternative illumination sources.

Purpose of the Study:

To develop and characterize a prototype LED-based illumination system for mask aligner lithography.
To evaluate the performance of the LED prototype as a replacement for mercury arc lamps.

Main Methods:

An LED-based illumination prototype was designed and constructed.
Optical characterization of the prototype was performed.
The prototype was tested in a mask aligner, evaluating uniformity and print resolution.

Main Results:

The LED prototype demonstrated excellent performance, comparable to standard mercury lamps.
Measured uniformity in the mask plane was 2.59 ± 0.24 %.
Resolution of 1 micron in contact printing and 3 microns in proximity printing (30-micron gap) was achieved.

Conclusions:

LED illumination is a viable and high-performing alternative for mask aligner lithography.
The developed LED prototype meets critical performance metrics for microfabrication.