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Related Experiment Video

Updated: Feb 11, 2026

Rapid Subtractive Patterning of Live Cell Layers with a Microfluidic Probe

Rapid Subtractive Patterning of Live Cell Layers with a Microfluidic Probe

Published on: September 15, 2016

Ultrafast multi-layer subtractive patterning.

Daniel J Heath, Taimoor H Rana, Rupert A Bapty

|May 3, 2018

Summary

This summary is machine-generated.

Subtractive femtosecond laser machining fabricates intricate surface relief structures with high precision. This advanced technique enables the creation of detailed 3D microstructures on various materials.

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Area of Science:

Materials Science
Nanotechnology
Laser Physics

Background:

Femtosecond laser machining is a key technique for microfabrication.
Controlling spatial intensity profiles allows for precise material removal.
Previous methods faced limitations in resolution and depth control.

Purpose of the Study:

To develop a subtractive femtosecond laser machining method for surface relief structuring.
To achieve high lateral spatial resolution and control over structure depth.
To demonstrate the fabrication of complex 3D microstructures with high repeatability.

Main Methods:

Utilized subtractive femtosecond laser machining with multiple pulses.
Employed a digital micromirror device as a spatial light modulator for intensity profiling.
Ensured precise alignment of successive laser masks relative to the sample.

Main Results:

Fabricated structures with up to 50 distinct layers.
Achieved a lateral spatial resolution of 335 nm and a maximum depth of 2.6 µm.
Demonstrated accurate replication of intended depth profiles in nickel substrates and repeatable stitching of features.

Conclusions:

Subtractive femtosecond laser machining with intensity spatial light modulation is effective for creating complex surface relief structures.
The method offers high precision, resolution, and repeatability for microfabrication.
This technique holds potential for advanced applications in micro-optics, sensors, and microfluidics.