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Note: An absolute X-Y-Θ position sensor using a two-dimensional phase-encoded binary scale.

Jong-Ahn Kim1, Jae Wan Kim1, Chu-Shik Kang1

  • 1Center for Optical Metrology, Korea Research Institute of Standards and Science, 267 Gajeong-ro, Yuseong-gu, Daejeon 305-340, South Korea.

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Summary
This summary is machine-generated.

A novel absolute X-Y-Θ position sensor precisely measures planar motion using a rotated 2D scale image. This system achieves high resolution for linear and angular displacements, crucial for precision multi-axis stage systems.

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Area of Science:

  • Metrology and Measurement Science
  • Precision Engineering
  • Optical Sensing Technologies

Background:

  • Precision multi-axis stage systems require accurate planar motion measurement.
  • Existing sensors may have limitations in resolution, accuracy, or absolute positioning.
  • The need for integrated X-Y-Θ (linear and angular) absolute position sensing is critical for advanced manufacturing and research.

Purpose of the Study:

  • To develop and present a new absolute X-Y-Θ position sensor.
  • To enable precise measurement of planar motion for multi-axis stage systems.
  • To achieve high resolution and repeatability in both linear and angular displacement detection.

Main Methods:

  • Utilized a two-dimensional (2D) phase-encoded binary scale and analyzed its rotated image.
  • Developed a sensor head comprising a board-level camera, LED light source, imaging lens, and cube beam-splitter.
  • Implemented image processing techniques, including deliberate selection of averaging directions for uniform intensity profiles.
  • Investigated the impact of allowable offset size on angular measurement resolution.

Main Results:

  • The prototype sensor achieved 25 nm linear and 0.001° angular displacement resolution.
  • Demonstrated high repeatability with standard deviations less than 18 nm for 2D grid position measurements.
  • Successfully calculated absolute X-Y-Θ position by combining data from two separated points on the 2D scale.
  • Uniform intensity profiles were obtained by optimizing averaging directions.

Conclusions:

  • The developed sensor effectively measures absolute X-Y-Θ position with high resolution and repeatability.
  • This technology is suitable for precision multi-axis stage systems demanding accurate planar motion sensing.
  • The sensor design offers a promising solution for advanced metrology applications.