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A microelectromechanical systems (MEMS) force-displacement transducer for sub-5 nm nanoindentation and adhesion

Youfeng Zhang1, Yunje Oh2, Douglas Stauffer2

  • 1Department of Mechanical Engineering, Texas A&M University, College Station, Texas 77840, USA.

The Review of Scientific Instruments
|May 3, 2018
PubMed

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