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Updated: Feb 10, 2026

Investigation of Early Plasma Evolution Induced by Ultrashort Laser Pulses
Published on: July 2, 2012
Mechanically metastable structures generated by single pulse laser-induced periodic surface structures (LIPSS) in the
Hendrik Reinhardt1, Patrick Peschke1, René Riedel1
1Department of Chemistry, Philipps-University of Marburg, D-35032 Marburg, Germany.
Abstract:
Laser-induced periodic surface structures (LIPSS) with a periodicity of 351 nm are generated in the negative photoresist SU8 by single nanosecond laser pulse impact. Friction scans indicate the periodic pattern to comprise alternating regions of crosslinked and non-crosslinked SU8. Intriguingly, even minor mechanical stimuli in the order of nanonewtons cause the unfolding or rather the deletion of the characteristic periodic pattern similarly to the release of a pre-loaded spring. This feature combined with high resilience to heat and photon irradiation makes SU8-LIPSS attractive for applications such as mechanical stress monitors, self-destructing memory and passive micro actuators.
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