Construction and Functionality of a Ceramic Resonant Pressure Sensor for Operation at Elevated Temperatures

Piezoelectric ceramic resonant pressure sensors have shown potential as sensing elements for harsh environments, such as elevated temperatures. For operating temperatures exceeding ~250 °C, conventional and widely used Pb(Zr,Ti)O₃ (PZT) piezoelectrics should be replaced. Here, a ceramic pressure sensor from low-temperature co-fired ceramics (LTCC) was constructed by integrating a piezoelectric actuator made from bismuth ferrite (BiFeO₃) on a diaphragm. This ferroelectric material was selected because of its high Curie temperature (T_C = 825 °C) and as a lead-free piezoelectric extensively investigated for high-temperature applications. In order to construct a sensor with suitable pressure sensitivity, numerical simulations were used to define the optimum construction dimensions. The functionality of the pressure sensor was tested up to 201 °C. The measurements confirmed a pressure sensitivity, i.e., resonance frequency shift of the sensor per unit of pressure, of -8.7 Hz/kPa up to 171 °C. It was suggested that the main reason for the hindered operation at the elevated temperatures could lie in the thermo-mechanical properties of the diaphragm and the adhesive bonding at the actuator-diaphragm interconnection.