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Polyimide-Based Capacitive Humidity Sensor

Jamila Boudaden1,2, Matthias Steinmaßl3,4,5, Hanns-Erik Endres6

  • 1Fraunhofer EMFT, Research Institution for Microsystems and Solid State Technologies EMFT, Hansastraße 27d, D-80686 Munich, Germany. jamila.boudaden@emft.fraunhofer.de.

Sensors (Basel, Switzerland)
|May 13, 2018
PubMed

Keywords:
flat polyimidehumidity sensornanograss polyimiderough polyimide

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