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Updated: Feb 10, 2026

Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications
Published on: April 21, 2016
Dielectric barrier discharge plasma treatment of modified SU-8 for biosensing applications
Jhonattan C Ramirez1, Juliana N Schianti1, Denio E P Souto2
1School of Electrical and Computer Engineering, University of Campinas, 13083-852 Campinas, SP, Brazil.
Abstract:
In this work we demonstrate the use of a dielectric barrier discharge plasma for the treatment of SU-8. The resulting hydrophilic surface displays a 5° contact angle and (0.40 ± 0.012) nm roughness. Using this technique we also present a proof of concept of IgG and prostate specific antigen biodetection on a thin layer of SU-8 over gold via surface plasmon resonance detection.
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