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A novel copper precursor for electron beam induced deposition.

Caspar Haverkamp1,2, George Sarau2,3, Mikhail N Polyakov4

  • 1Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, Hahn-Meitner-Platz 1, 14109 Berlin, Germany.

Beilstein Journal of Nanotechnology
|May 17, 2018
PubMed
Summary

A new fluorine-free copper precursor enables focused electron beam induced deposition (FEBID) of copper-carbon nanocomposites. These materials show potential for future plasmonic applications.

Keywords:
Cu(tbaoac)2copperfocused electron beam induced depositionnanostructuresoptical properties

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Surface Science

Background:

  • Focused electron beam induced deposition (FEBID) is a versatile nanofabrication technique.
  • Developing novel precursors is crucial for advancing FEBID capabilities.
  • Copper-based nanomaterials are of interest for plasmonic applications.

Purpose of the Study:

  • To introduce and characterize a novel fluorine-free copper precursor for FEBID.
  • To investigate the composition, structure, and optical properties of FEBID-deposited materials.
  • To explore the potential of these materials for plasmonic applications.

Main Methods:

  • Focused electron beam induced deposition (FEBID) using a novel copper precursor (Cu(tbaoac)2).
  • Compositional analysis using energy-dispersive X-ray spectroscopy (EDS) implied by atomic composition.
  • Microstructural characterization using transmission electron microscopy (TEM).
  • Structural analysis using Raman spectroscopy.
  • Optical characterization via transmission/reflection measurements.
  • Modeling of dielectric properties using the Maxwell-Garnett mixing model.

Main Results:

  • A fluorine-free copper precursor, Cu(tbaoac)2, was successfully used for FEBID.
  • Deposits comprised copper nanocrystals (up to 15 nm) within an amorphous carbon matrix (Cu:O:C ratio ~1:1:2).
  • Evidence of partial copper oxidation on deposit surfaces was observed.
  • The material exhibited dielectric behavior in the optical spectral range, consistent with the Maxwell-Garnett model.
  • Simulations of tip arrays using measured dielectric functions showed good agreement with experimental data.

Conclusions:

  • The novel fluorine-free copper precursor is suitable for FEBID fabrication of copper-carbon nanocomposites.
  • The resulting materials possess properties amenable to optical applications.
  • This work demonstrates a pathway towards copper-based plasmonic devices fabricated via FEBID.