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Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS
Published on: June 17, 2017
Matias Urdampilleta1,2, Cedric Ayela3,4,5, Pierre-Henri Ducrot6,7,8
1CNRS, CRPP, UMR 5031, 33600, Pessac, France. matias.urdampilleta@neel.cnrs.fr.
This study introduces novel microelectromechanical systems (MEMS) sensors functionalized with switchable magnetic molecules. These molecular electronics devices can detect light and heat, and act as non-volatile memory.
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