Synthetic model of nonlinearity errors in laser heterodyne interferometry
Applied Optics
|May 24, 2018
Summary
Periodic nonlinearity errors limit laser heterodyne interferometry accuracy. Adjusting optical element orientation reduces first-harmonic errors, while avoiding polarization beam splitter misalignment minimizes second-harmonic errors.
Area of Science:
- Optics and Photonics
- Metrology
Background:
- Laser heterodyne interferometry demands high resolution and accuracy.
- Periodic nonlinearity errors significantly degrade measurement precision.
Purpose of the Study:
- Analyze nonlinearity error sources in laser heterodyne interferometry.
- Establish a synthetic model to evaluate error influences.
- Provide a basis for error reduction and compensation.
Main Methods:
- Analysis of nonlinearity error generation mechanisms.
- Development of a synthetic model for error analysis.
- Evaluation of optical element orientation and polarization beam splitter misalignment.
Main Results:
- First-harmonic nonlinearity errors are reducible by adjusting optical element orientation.
- Azimuthal misalignment of the polarization beam splitter is the primary source of second-harmonic nonlinearity errors.
Conclusions:
- Understanding error sources is crucial for improving laser heterodyne interferometry.
- Specific adjustments can mitigate first-harmonic errors.
- Avoiding polarization beam splitter misalignment is key to suppressing second-harmonic errors.
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