Single-mode light guiding in diamond waveguides directly written by a focused proton beam

Ion-implanted waveguides were directly written in bulk single-crystal diamond by scanning a focused 2 MeV proton beam. By controlling the fluence and the lateral size of the proton beam, a bright and near-circular single-mode profile was observed. Propagation loss and effective refractive index of the guided mode were measured by the Fabry-Pérot technique, confirming single-mode guiding. Micro-Raman maps of the waveguides were used to visualize damage profiles and defect distributions induced by the proton beam. The demonstration of single-mode light guiding in our waveguides shows that direct proton beam writing is a promising tool in the rapid manufacture of integrated optical circuits in bulk diamond.