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Updated: Feb 9, 2026

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Fabrication of tunable diffraction grating by imprint lithography with photoresist mold

Itsunari Yamada1, Yusuke Ikeda2, Tetsuya Higuchi2

  • 1Department of Electrical and Electronic Engineering, Faculty of Science and Engineering, Setsunan University, 17-8 Ikeda-Nakamachi, Neyagawa, Osaka 572-8508, Japan.

The Review of Scientific Instruments
|June 6, 2018
PubMed

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