Differential computation method used to calibrate the angle-centroid relationship in coaxial reverse Hartmann test

Xinji Li1, Mei Hui1, Zhu Zhao1

  • 1Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China.

Summary

A new differential computation method enhances the calibration precision of the coaxial reverse Hartmann test (RHT) by using relative distances. This advancement improves RHT precision by approximately 100 nm.

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