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Simultaneous reflectometry and interferometry for measuring thin-film thickness and curvature

A A Arends1, T M Germain1, J F Owens1

  • 1Department of Mechanical and Aerospace Engineering, College of Engineering and Computer Science, University of Central Florida, Orlando, Florida 32816, USA.

The Review of Scientific Instruments
|June 6, 2018
PubMed

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