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Electrical and Thermal Properties of Heater-Sensor Microsystems Patterned in TCO Films for Wide-Range Temperature

Ryszard Pawlak1, Marcin Lebioda2

  • 1Institute of Electrical Engineering Systems, Lodz University of Technology, Lodz 90-924, Poland. ryszard.pawlak@p.lodz.pl.

Sensors (Basel, Switzerland)
|June 8, 2018
PubMed

Keywords:
cryogenicheating microstructureslaser patterningtransparent conducting oxides

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