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Transmission-enabled fiber Fabry-Perot cavity based on a deeply etched slotted micromirror
Applied Optics
|June 8, 2018
Summary
This study details a novel optical cavity using a Bragg-coated fiber mirror and a microelectromechanical systems (MEMS) slotted micromirror. This adaptable filter design enables versatile spectral responses for advanced optical applications.
Area of Science:
- Photonics and Optical Engineering
- Microelectromechanical Systems (MEMS)
Background:
- Optical cavities are fundamental components in various photonic devices.
- Developing tunable and efficient optical filters is crucial for telecommunications and sensing.
Purpose of the Study:
- To design, fabricate, and characterize a novel transmission-type optical cavity.
- To explore the spectral response and performance of a MEMS-based tunable optical filter.
Main Methods:
- Theoretical modeling using Fourier optics analysis for cavity response.
- Fabrication of MEMS slotted micromirrors via deep reactive ion etching.
- Characterization of the optical cavity as a filter across E-band and L-band wavelengths.
Main Results:
- Achieved >95% reflectivity over a 300 nm range using a Bragg-coated fiber mirror.
- Demonstrated versatile filter characteristics by varying MEMS slit width and cavity length.
- Obtained a free spectral range (FSR) of ~33 nm and Q-factor of ~196 for an aluminum slit, and FSR of ~148 nm and Q-factor of ~148 for a gold slit.
Conclusions:
- The developed optical cavity with a MEMS slotted micromirror offers tunable spectral characteristics.
- This adaptable structure paves the way for next-generation transmission-type MEMS optical filters with wide spectral response capabilities.
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