Ultra-Precision Machining of a Compound Sinusoidal Grid Surface Based on Slow Tool Servo

Compound sinusoidal grid surface with nanometric finish plays a significant role in modern systems and precision calibrator, which can make the systems smaller, the system structure more simple, reduce the cost, and promote the performance of the systems, but it is difficult to design and fabricate by traditional methods. In this paper, a compound freeform surface constructed by a paraboloidal base surface and sinusoidal grid feature surface is designed and machined by slow tool servo (STS) assisted with single point diamond turning (SPDT). A novel combination of the constant angle and constant arc-length method is presented to optimize the cutting tool path. The machining error prediction model is analyzed for fabricating the compound sinusoidal grid surface. A compound sinusoidal grid surface with 0.03 mm amplitude and period of 4 is designed and cutting process is simulated by use of MATLAB software, machining experiment is done on ultra-precision machine tool, the surface profile and topography are measured by Taylor Hobson and Keyence VR-3200, respectively. After dealing with the measurement data of compound freeform surface, form accuracy 4.25 μm in Peak Village value (PV), and surface roughness 89 nm in Ra are obtained for the machined surface. From the theoretical analysis and experimental results, it can be seen that the proposed method is a reasonable choice for fabricating the compound sinusoidal grid surface.