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Sensitivity Enhancement of Soft Capacitive Pressure Sensors Using a Solvent Evaporation-Based Porosity Control Technique
Published on: March 24, 2023
Swapan K Roy1,2, Vincent T K Sauer1,3, Jocelyn N Westwood-Bachman1,2
1Nanotechnology Research Centre, National Research Council of Canada, Edmonton, Alberta T6G 2M9, Canada.
Frequency stability in nanomechanical sensors improves with lower quality factors. Increased damping enhances sensor resolution and stability, particularly at low bandwidths, enabling new high-performance applications.
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