Calibration of micro-capacitance measurement system for thermal barrier coating testing

In order to comprehensively evaluate the thermal barrier coating system of an engine blade, an integrated planar sensor combining electromagnetic coils with planar capacitors is designed, in which the capacitance measurement accuracy of the planar capacitor is a key factor. The micro-capacitance measurement system is built based on an impedance analyzer. Because of the influence of non-ideal factors on the measuring system, there is an obvious difference between the measured value and the actual value. It is necessary to calibrate the measured results and eliminate the difference. In this paper, the measurement model of a planar capacitive sensor is established, and the relationship between the measured value and the actual value of capacitance is deduced. The model parameters are estimated with the least square method, and the calibration accuracy is evaluated with experiments under different dielectric conditions. The capacitance measurement error is reduced from 29% ∼ 46.5% to around 1% after calibration, which verifies the feasibility of the calibration method.