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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Magnetically confined electron beam system for high resolution electron transmission-beam experiments

A I Lozano1, J C Oller2, K Krupa1

  • 1Instituto de Física Fundamental, Consejo Superior de Investigaciones Científicas, Madrid, Spain.

The Review of Scientific Instruments
|July 2, 2018
PubMed

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