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Partial compensation interferometry measurement system for parameter errors of conicoid surface.

Qun Hao1, Tengfei Li1, Yao Hu1

  • 1Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology, School of Optics and Photonics, Beijing Institute of Technology, Beijing, 100081, China.

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|July 2, 2018
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Summary
This summary is machine-generated.

A new partial compensation interferometry system precisely measures surface parameter errors (SPEs) in conicoid optics. This method achieves high accuracy for vertex radius of curvature and conic constant errors, crucial for optical surface evaluation.

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Area of Science:

  • Optical Engineering
  • Metrology
  • Surface Science

Background:

  • Aspheric surfaces are defined by parameters like vertex radius of curvature and conic constant.
  • Surface parameter errors (SPEs) significantly impact optical performance and require precise measurement.
  • Accurate evaluation of optical surfaces necessitates reliable SPE measurement techniques.

Purpose of the Study:

  • To propose a novel partial compensation interferometry system for measuring SPEs in conicoid surfaces.
  • To develop a method for calculating SPEs by measuring changes in best compensation distance and surface shape.
  • To enhance measurement accuracy through an iterative algorithm.

Main Methods:

  • Utilized the theory of slope asphericity and the concept of best compensation distance.
  • Designed a partial compensation interferometry system to measure SPE-induced changes.
  • Employed an iteration algorithm for calculating SPEs from measured data.

Main Results:

  • The proposed system successfully measures SPE-caused changes in best compensation distance and surface shape.
  • Experimental results demonstrate high measurement accuracy.
  • Achieved average relative measurement accuracy better than 0.02% for vertex radius of curvature error and 2% for conic constant error.

Conclusions:

  • The developed partial compensation interferometry system offers a precise method for SPE measurement on conicoid surfaces.
  • The system's accuracy meets stringent requirements for optical surface evaluation.
  • This technique provides a valuable tool for quality control in optical manufacturing.