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Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
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Comparison of oxidation in uni-directionally and randomly oriented Cu films for low temperature Cu-to-Cu direct

Chih-Han Tseng1, K N Tu2,3, Chih Chen4

  • 1Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu, Taiwan, 30010, Republic of China.

Scientific Reports
|July 15, 2018
PubMed

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