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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Modeling and Analysis of a Novel Ultrasensitive Differential Resonant Graphene Micro-Accelerometer with Wide

Fu-Tao Shi1, Shang-Chun Fan2, Cheng Li3

  • 1School of Instrumentation Science and Opto-electronics Engineering, Beihang University, Beijing 100191, China. futaoshi@buaa.edu.cn.

Sensors (Basel, Switzerland)
|July 18, 2018
PubMed

Keywords:
MEMS/NEMS (micro/nanoelectromechanical systems) sensorsaccelerometergraphene resonatorsimulation analysis

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