Enabling silicon-on-silicon photonics with pedestalled Mie resonators

Area of Science:

• Nanophotonics
• All-dielectric metamaterials
• Silicon photonics

Background:

• High-refractive-index Mie resonators are key for low-loss nanophotonics.
• Implementing these resonators on low-index substrates is necessary to prevent damping and loss of symmetry.
• This requirement limits practical applications and integration.

Purpose of the Study:

• To propose a new photonic structure for high-refractive-index Mie resonators.
• To enable low-loss nanophotonic applications without low-index substrates.
• To facilitate the development of hybrid photonic/electronic devices.

Main Methods:

• Fabrication of silicon-on-silicon spheroidal-like resonators.
• Utilizing slim silicon pedestals for optical separation and mechanical/electrical stability.
• Standard lithography for precise control over size and arrangement.

Main Results:

• The proposed structure achieves optical performance comparable to low-index substrates.
• Demonstrated mechanical stability and electrical contact via silicon pedestals.
• Enabled precise control over resonator size and arrangement.

Conclusions:

• The silicon-on-silicon spheroidal resonator design overcomes substrate limitations.
• This approach opens new possibilities for hybrid photonic/electronic devices.
• Offers a pathway for practical, low-loss all-dielectric nanophotonic applications.