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Oscillation Suppression in the Sense Mode of a High-Q MEMS Gyroscope Using a Simplified Closed-Loop Control Method

Qiang Shen1,2, Xinpeng Wang3,4, Yixuan Wu5,6

  • 1Research & Development Institute, Northwestern Polytechnical University, Shenzhen 518057, China. shenq@nwpu.edu.cn.

Sensors (Basel, Switzerland)
|August 1, 2018
PubMed

Keywords:
MEMS gyroscopecontrol circuitsense-mode oscillation suppression

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