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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Published on: August 8, 2025

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Silicon slot waveguide Fano resonator

Arijit Bera, Markku Kuittinen, Seppo Honkanen

    Optics Letters
    |August 2, 2018
    PubMed

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