Related Experiment Video
Updated: Feb 7, 2026

Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools
Published on: October 1, 2007
Thermal Compensation of Low-Cost MEMS Accelerometers for Tilt Measurements
Giuseppe Ruzza1, Luigi Guerriero2, Paola Revellino3
1Department of Science and Technology, University of Sannio, 82100 Benevento, Italy. giuseppe.ruzza@unisannio.it.
Abstract:
Low-cost MEMS accelerometers have the potential to be used in a number of tilt-based monitoring applications but have the disadvantage of being very sensitive to temperature variation (thermal drift). In this paper, we analyze the thermal behavior of a low-cost sensor in the range -10 to +45 °C in order to provide a simple compensation strategy to mitigate this problem. For sensor analysis, we have developed a miniaturized thermal chamber, which was mounted on a tilting device to account for tilt angle variation. The obtained raw data were used to construct low degree polynomial equations that by relating the measurement error induced by thermal drift (i.e., acceleration residuals) to temperature and inclination (of each specific axis), can be used for thermal compensation. To validate our compensation strategy, we performed a field monitoring test and evaluated the compensation performance by calculating RMS errors before and after correction. After compensation, the RMS errors calculated for both the X and Y axes decreased by 96%, indicating the potential of using a simple set of equations to solve common drawbacks that currently make low-cost MEMS sensors unsuitable for tilt-based monitoring applications.
Related Concept Videos
Dosage Compensation
In addition to sexual development, the X chromosome has genes involved in autosomal functions such as brain development and the immune system. Therefore, males and females with distinct numbers of X chromosomes will...
Compensation Mechanisms
Respiratory Compensation
This mechanism addresses metabolic-induced pH imbalances by adjusting breathing rates. Respiratory compensation begins within minutes of detecting a pH...
Thermal expansion and Thermal stress: Problem Solving
To solve the problem, first, identify the known and unknown quantities. The initial length (L) of the bridge is 1275 m, the coefficient of linear expansion (α) for steel is 12 x 10-6/°C, and the change in temperature (ΔT) is 55...
Thermal Strain
Thermal Expansion
Thermal Stress

