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Fabrication Technology and Characteristics Research of a Monolithically-Integrated 2D Magnetic Field Sensor Based on

Xiaofeng Zhao1, Chenchen Jin2, Qi Deng3

  • 1School of Electronics Engineering, Heilongjiang University, Harbin 150080, China. zhaoxiaofeng@hlju.edu.cn.

Sensors (Basel, Switzerland)
|August 8, 2018
PubMed

Keywords:
MEMS technologydifference structuremonolithic integrationsilicon magnetic sensitive transistortwo-dimensional magnetic field sensor

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